Ukuhlolwa kobulukhuni bomphezulu, ukuphakama kwesinyathelo kanye nobukhulu befilimu encane kuma-wafers e-semiconductor, amalensi optical anembile kanye nezingxenye ezimboziwe kunquma ngqo isivuno sokukhiqiza. Ukuskena kwe-contact probe yendabuko kuklwebha kalula amasampula abucayi, kuyilapho imishini yokulinganisa evamile ye-optical ingakwazi ukuletha ukunemba kwezinga le-nano. Ungakufeza kanjani ukuhlolwa okungonakalisi, ukunemba kwe-nano okuphezulu kakhulu kanye nokuhlolwa kokukhiqizwa kwesisindo okuphezulu ngesikhathi esisodwa?
I-interferometer entsha yokukhanya okumhlophe kwezimboni ye-Wavelength OE inezindlela zokulinganisa i-interferometry ezimbili. Ngokuthola okungathintani, ihlanganisa ukuhamba komsebenzi okugcwele kusukela ku-R&D yelabhorethri kuya ku-QC yokukhiqiza eku-inthanethi.
Izindlela Zokuhlobana Ezimbili Ze-Core Zazo Zonke Izindawo Zokuhlobana Komphezulu
Ngokungafani namadivayisi okulinganisa emodi eyodwa, lolu hlelo luhlanganisa ama-algorithm e-VSI (Vertical Scanning Interferometry) kanye ne-PSI (Phase-Shifting Interferometry), okwanelisa izidingo ezimbili zokulinganisa eziyinhloko ngomshini owodwa.
| Into Yokuqhathanisa | I-VSI / i-CSI | I-PSI |
|---|---|---|
| Izindawo Eziyinhloko Ezisebenzayo | Izindawo ezimagebhugebhu, izitebhisi, izindawo ezingapheli neziyinkimbinkimbi | Izindawo ezibushelelezi kakhulu, eziqhubekayo nezibukwayo |
| Ibanga Lokulinganisa Ukuphakama Okuqondile | ububanzi obubanzi; ikwazi ukukala imisele ejulile kanye nezinyathelo eziphakeme | Ububanzi obuncane; akufaneleki ezitebhisini ezinkulu ezihlukanisiwe |
| Isixazululo Esiqondile | Izinga le-nanometer; i-sub-nanometer ingafinyeleleka ngama-algorithms alungiselelwe kahle | Isixazululo esiphezulu kakhulu; ukuphindaphindeka kuze kufike ezingeni le-sub-nanometer ngisho nele-sub-angstrom |
| Ukubekezelela Ubulukhuni Bomphezulu | Phezulu | Phansi |
| Ukungacaci Kwesigaba | Cishe akukho lutho; umkhiqizo wenani lokuphakama eliphelele uyatholakala | Kuncike ephutheni lokugoqa lesigaba esingu-2π |
| Isivinini Sokulinganisa | Kudinga ukuskena kwe-axial, kuhamba kancane | Ngokuvamile kuyashesha |
| Ukumelana Nokudlidliza | Ingathinteka ekudlidlizeni ngesikhathi sokuskena | Ukushintsha kwesigaba esinezinhlaka eziningi, okuzwela kakhulu ekudlidlizeni |
| Izicelo Ezijwayelekile | Ubulukhuni, ukuphakama kwezinyathelo, izakhiwo ezincane, izindawo ezifakwe ngomshini | Ukuhlolwa kobulukhuni bomphezulu obubushelelezi kakhulu, ukuma komphezulu kanye nokuthamba |
I-PSI (i-Phase-Shifting Interferometry): Ikhethekile ngezici zokuphakama okuncane kakhulu kanye namafilimu amancane kakhulu, okunikeza isixazululo esiphezulu se-microscopic.
Isibuko Sendiza
Isibuko Esigobile （Isibuko Esiqondile）
Isampula Yephethini Yezithombe
I-VSI Vertical Scanning Interferometry: Yenzelwe izinto zokusebenza ezinokuphakama okukhulu kanye nezinyathelo ezinde; ububanzi obuphelele bokulinganisa buyatholakala ngaphandle kokuskena okuhlukaniswe ngezigaba.
I-micro bump array eyindilinga kuma-wafer apakishwe kahle
I-elliptical micro bump array kuma-wafers apakishwe kahle
uhlu lwamalensi amancane
Ihambisana nomthombo wokukhanya omhlophe ohambisanayo ongama-450–700 nm, ingavimbela ngempumelelo ukukhanya okulahlekile okuvela ekukhanyeni okuningi futhi inikeze ukusebenza okuqinile kokulwa nokuphazamiseka. Ifakwe izembozo ezinezingqimba eziningi, le ngxenye yokukhanya enokukhanya okuphansi ingakhipha izimpawu zokuphazamiseka ezizinzile nezihlukile, iveze imiphumela yokulinganisa yangempela nethembekile.
2. Imininingwane Ehamba Phambili Yezinga Le-Nano, Idatha Yesikhathi Eside Elandelekayo Nezinzile
-Isistimu isebenzisa umthombo wokukhanya omhlophe we-LED onobude obuphakathi obungu-550 nm, ohlonyiswe ngamapharamitha okusebenza aphezulu ahambisana nezindinganiso ze-premium zomhlaba wonke.
-Isixazululo Esiqondile: <1 nm, iphutha lokulinganisa eliphindaphindwayo: <10 nm, ukunemba kwe-nanometer yangempela
-Ibanga eliphezulu lokulinganisa eliqondile: 500 μm, akukho ukuhlelwa kabusha okuphindaphindiwe okudingekayo kwezakhiwo ezincane eziphansi kakhulu.
-Isivinini sokuskena: 100 μm/s, ukuskena okukodwa okugcwele kuqediwe ngemizuzwana eyi-10, kulinganisa ukunemba kanye nomphumela wokuhlola.
-Ihambisana nezindinganiso ze-NIST ezilandelekayo, i-algorithm yokulinganisa okuzenzakalelayo eyakhelwe ngaphakathi iqinisekisa idatha ye-batch elandelekayo ehambisanayo, ihlangabezana nezindinganiso ze-QC eziqinile zezimboni ze-semiconductor kanye ne-optical.
| Into | Ipharamitha |
| Ukulinganisa Amandla | I-topography yobuso obuyi-3D, ubulukhuni bobuso, ukuphakama kwesinyathelo kanye nobukhulu befilimu yezinto ezibonisa ukukhanya kanye nezingxenye ezibonakalayo |
| Imodi Yokuthola Idatha | I-Vertical Scanning Interferometry (VSI) + I-Phase-Shifting Interferometry (PSI) |
| Uhlelo Lokulinganisa | I-NIST ejwayelekile elandelekayo + i-algorithm yokulinganisa okuzenzakalelayo |
| Ibanga Lokulinganisa Eliqondile | 500 μm |
| Insimu Yokubuka | 20× inhloso: 0.87 × 0.65 mm |
| Ukusebenza Kwekhamera | Isixazululo Esiphezulu: 2048×2448; Izinga Lohlaka: 74 Fps; Ukujula Kwebhithi: 12 bhithi |
| Isivinini Sokuskena | 100 μm/s (Imodi Yokunemba) |
| Izinketho Zelensi Yenhloso | Izinhloso zokukhulisa ezingama-20x / 50x ezilungisekayo |
| Umklamo Wokufaka | Ipulatifomu yokuhlukanisa ukudlidliza esebenzayo eyakhelwe ngaphakathi, ukufakwa okuvundlile nokuqondile kuyatholakala |
| Ubukhulu Obuphelele (L×W×H) | 120 × 80 × 65 cm |
| Isisindo sengqikithi | ≤58 kg |
3. Umklamo Wekhabhinethi Ohlanganisiwe Wezimboni, Ohambisana Nomugqa Welebhu Nokukhiqiza
Kwenzelwe kokubili ama-workshop okukhiqiza ngobuningi kanye namalebhu ocwaningo lwesayensi anokuhambisana kokufakwa okuguquguqukayo.
Ipulatifomu yokuhlukanisa ukudlidliza esebenzayo eyakhelwe ngaphakathi: Ukulinganisa okuzinzile ngaphansi kokudlidliza kwefektri, akudingeki itafula lokuhlukanisa ukudlidliza elengeziwe.
Isakhiwo sokufaka esikabili: Ukusetha okuvundlile noma okuqondile, ukuhlanganiswa okulula nemigqa yokukhiqiza ezenzakalelayo kanye nezindawo zokusebenza zelebhu.
Umzimba omncane ohlanganisa konke: Unyawo oluncane olunobukhulu obungu-120×80×65 cm, isisindo esingu-≤58 kg, ukufakwa okulula endaweni.
Uhlelo oluphelele luhlanganisa umthombo wokukhanya, iyunithi eyinhloko ye-interferometer kanye nemojuli yokulawula. Xhuma bese udlala ngemva kokuvula, akukho ukulungiswa kwendlela yokukhanya okuyinkimbinkimbi okudingekayo.
Ukumbozwa Okubanzi Kwesicelo Sokukhiqiza Okunembe Kakhulu
Imboni Yezinjini Zokupompa Izinsimbi: Ukuhlolwa kwesimo se-3D kanye nokuphakama kwezinyathelo zama-wafer e-silicon nama-micro-nano chips.
I-Precision Optics: Ukuhlolwa kokuqina kanye nobukhulu befilimu yamalensi optical, izinhloso kanye nezinto ezimboziwe zokukhanya.
Izembozo Ezintsha Ezisebenzayo: Ukuhlaziywa kwephrofayili yobuso kanye nobukhulu bezembozo ezikhanyayo namafilimu amancane asebenzayo.
Amalebhu Ocwaningo Lwesayensi: Ukuhlolwa kokuhlukaniswa kwesakhiwo se-micro-nano kanye nokuhlolwa kokwakheka kwezingxenye ngokunemba.
Njengoba ineminyaka eminingi yesipiliyoni sobungcweti ku-R&D ye-optical, i-Wavelength OE ithuthukisa ngokuzimela zonke izindlela eziyinhloko ze-optical kanye nama-algorithms okulinganisa ama-interferometer okukhanya okumhlophe. Ukulawula okugcwele kobuchwepheshe kusukela emithonjeni yokukhanya, amalensi aqondile kuya ezinhlelweni zokulinganisa. Iyunithi ngayinye idlula ekulinganisweni okunembile okunemijikelezo eminingi ngaphambi kokulethwa. Sinikeza ukwesekwa okugcwele kobuchwepheshe ngemuva kokuthengisa futhi senze ngezifiso izixazululo zokulinganisa ezikhethekile ngokusekelwe kusayizi womsebenzi wamakhasimende kanye nezidingo zomugqa wokukhiqiza ozenzakalelayo.
Isikhathi sokuthunyelwe: Julayi-15-2026