Amalensi e-F-Theta avame ukusetshenziswa kanye nezibuko zokuskena ze-galvanometer ezinhlelweni zokuqopha, ukusika, kanye nokumaka nge-laser. Ngokuvamile ukuphambuka kwelensi ye-F-Theta kugcinwa ngaphansi kuka-1% ukuze ikwazi ukukhiqiza indawo eqondile ensimini eyisicaba endaweni yesithombe.
Ukubekezelelana kobubanzi: +0/-0.13mm
Ukubekezelela Ubukhulu: ± 0.25mm
Ukubekezelela Ubude Bokugxila: ± 2%
Ukwehluka Kobungqimba Bomphetho (ETV): ≤3 arc min.
Imbobo Ecacile: >90%
Surface Flatness: λ/4 per 1″ Dia@632.8nm
Ikhwalithi Yomphezulu: 40-20 SD
Ukwembozwa kwe-AR: R<0.2% ngobuso ngabunye @10.6μ